Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6268299 | Variable stoichiometry silicon nitride barrier films for tunable etch selectivity and enhanced hyrogen permeability | Rajarao Jammy, Johnathan E. Faltermeier, Ryota Katsumata, Jean-Marc Rousseau, Viraj Y. Sardesai +1 more | 2001-07-31 |
| 6156599 | Method of making a semiconductor device with capacitor | Tomonori Aoyama | 2000-12-05 |
| 5852307 | Semiconductor device with capacitor | Tomonori Aoyama | 1998-12-22 |
| 5686151 | Method of forming a metal oxide film | Masahiro Kiyotoshi, Haruo Okano | 1997-11-11 |
| 5641702 | Method of making semiconductor integrated-circuit capacitor | Haruo Okano, Tomonori Aoyama, Yasunori Okayama | 1997-06-24 |
| 5618761 | Method of manufacturing a perovskite thin film dielectric | Kazuhiro Eguchi, Masahiro Kiyotoshi | 1997-04-08 |
| 5440157 | Semiconductor integrated-circuit capacitor having a carbon film electrode | Haruo Okano, Tomonori Aoyama, Yasunori Okayama | 1995-08-08 |
| 5431561 | Method and apparatus for heat treating | Kikuo Yamabe, Katsuya Okumura, Ken Nakao, Seikou Ueno | 1995-07-11 |
| 5297956 | Method and apparatus for heat treating | Kikuo Yamabe, Katsuya Okumura, Ken Nakao, Seikou Ueno | 1994-03-29 |
| 5239614 | Substrate heating method utilizing heating element control to achieve horizontal temperature gradient | Seiko Ueno, Ken Nakao, Kikuo Yamabe | 1993-08-24 |
| 5189503 | High dielectric capacitor having low current leakage | Kyoichi Suguro, Mitsutoshi Koyama, Kikuo Yamabe | 1993-02-23 |
| 4735824 | Method of manufacturing an MOS capacitor | Kikuo Yamabe | 1988-04-05 |