Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5239614 | Substrate heating method utilizing heating element control to achieve horizontal temperature gradient | Ken Nakao, Kikuo Yamabe, Keitaro Imai | 1993-08-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5239614 | Substrate heating method utilizing heating element control to achieve horizontal temperature gradient | Ken Nakao, Kikuo Yamabe, Keitaro Imai | 1993-08-24 |