Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812136 | Method of making a semiconductor device having a multilayer metal film of titanium/titanium nitride/tungsten/tungsten carbide | Toshio Shimizu, Takeshi Kubota | 2004-11-02 |
| 6424045 | Semiconductor device with pure copper wirings and method of manufacturing a semiconductor device with pure copper wirings | Takeshi Kubota | 2002-07-23 |
| 5990008 | Semiconductor device with pure copper wirings and method of manufacturing a semiconductor device with pure copper wirings | Takeshi Kubota | 1999-11-23 |
| 5589421 | Method of manufacturing annealed films | Naoto Miyashita, Koichi Takahashi, Shinji Nunotani, Satoshi Yanagiya, Yoshiro Baba | 1996-12-31 |
| 5380399 | Method of treating semiconductor substrates | Naoto Miyashita, Koichi Takahashi | 1995-01-10 |
| 5189503 | High dielectric capacitor having low current leakage | Kyoichi Suguro, Keitaro Imai, Kikuo Yamabe | 1993-02-23 |
| 5127365 | Vertical heat-treatment apparatus for semiconductor parts | Koichi Takahashi, Hironori Sonobe | 1992-07-07 |
| 5111272 | Semiconductor device having element regions electrically isolated from each other | Naoto Miyashita, Koichi Takahashi, Hironori Sonobe | 1992-05-05 |
| 4485000 | Sputtering target supporting device | Tatsuzo Kawaguchi | 1984-11-27 |