Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9375748 | Substrate processing apparatus and substrate processing method | Tadashi Miyagi, Yukihiko Inagaki, Koji Kaneyama | 2016-06-28 |
| 9028621 | Substrate cleaning method and substrate cleaning device | Tadashi Miyagi, Sadayasu SUYAMA | 2015-05-12 |
| 8956695 | Developing method | Akira Yamaguchi, Akihiro Hisai, Minoru Sugiyama, Takuya Kuroda | 2015-02-17 |
| 8781308 | Apparatus for and method of heat-treating film formed on surface of substrate | — | 2014-07-15 |
| 8137576 | Substrate developing method and developing apparatus | Akira Yamaguchi, Akihiro Hisai | 2012-03-20 |
| 7597491 | Apparatus for and method of processing substrate | Masakazu Sanada | 2009-10-06 |
| 6869234 | Developing apparatus and developing method | Masakazu Sanada, Hiroshi Kobayashi, Minobu Matsunaga, Akihiko Morita | 2005-03-22 |
| 6752544 | Developing apparatus and developing method | Masakazu Sanada, Hiroshi Kobayashi, Minobu Matsunaga | 2004-06-22 |
| 6749351 | Apparatus for developing substrate | Masakazu Sanada | 2004-06-15 |
| 6692165 | Substrate processing apparatus | Akiko Tanaka, Masakazu Sanada, Osamu Tamada, Kayoko Nakano | 2004-02-17 |
| 6656277 | Apparatus for and method of processing substrate | Masakazu Sanada, Hiroshi Kobayashi, Minobu Matsunaga | 2003-12-02 |