Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6640023 | Single chip optical cross connect | Samuel Lee Miller, Paul McWhorter, Murray Steven Rodgers, Stephen Barnes | 2003-10-28 |
| 6615496 | Micromachined cutting blade formed from {211}-oriented silicon | James G. Fleming, Stephen Montague | 2003-09-09 |
| 6600587 | Surface micromachined optical system with reinforced mirror microstructure | M. Steven Rodgers | 2003-07-29 |
| 6545385 | Microelectromechanical apparatus for elevating and tilting a platform | Samuel Lee Miller, Paul McWhorter, Murray Steven Rodgers, Stephen Barnes | 2003-04-08 |
| 6402969 | Surface—micromachined rotatable member having a low-contact-area hub | M. Steven Rodgers | 2002-06-11 |
| 6350015 | Magnetic drive systems and methods for a micromachined fluid ejector | Arthur M. Gooray, George J. Roller, Joseph M. Crowley, Paul C. Galambos, Frank J. Peter +3 more | 2002-02-26 |
| 6290859 | Tungsten coating for improved wear resistance and reliability of microelectromechanical devices | James G. Fleming, Seethambal S. Mani, Robert S. Blewer | 2001-09-18 |
| 6174820 | Use of silicon oxynitride as a sacrificial material for microelectromechanical devices | Scott D. Habermehl | 2001-01-16 |
| 6082208 | Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed | M. Steven Rodgers, Samuel Lee Miller, Paul McWhorter | 2000-07-04 |
| 5920067 | Monocrystalline test and reference structures, and use for calibrating instruments | Michael W. Cresswell, R. N. Ghoshtagore, Loren W. Linholm, Richard A. Allen, William B. Penzes +1 more | 1999-07-06 |
| 5804084 | Use of chemical mechanical polishing in micromachining | Robert D. Nasby, Dale L. Hetherington, Paul McWhorter, Christopher A. Apblett | 1998-09-08 |
| 5798283 | Method for integrating microelectromechanical devices with electronic circuitry | Stephen Montague, James H. Smith, Paul McWhorter | 1998-08-25 |
| 5783340 | Method for photolithographic definition of recessed features on a semiconductor wafer utilizing auto-focusing alignment | Anthony J. Farino, Stephen Montague, James H. Smith, Paul McWhorter | 1998-07-21 |
| 5684301 | Monocrystalline test structures, and use for calibrating instruments | Michael W. Cresswell, R. N. Ghoshtagore, Loren W. Linholm, Richard A. Allen | 1997-11-04 |
| 5649423 | Micromechanism linear actuator with capillary force sealing | — | 1997-07-22 |
| 5631514 | Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process | Ernest J. Garcia | 1997-05-20 |
| 5339051 | Micro-machined resonator oscillator | Dale R. Koehler, Hugh M. Bivens, Kurt O. Wessendorf | 1994-08-16 |
| 5188983 | Polysilicon resonating beam transducers and method of producing the same | Henry Guckel | 1993-02-23 |
| 5090254 | Polysilicon resonating beam transducers | Henry Guckel | 1992-02-25 |
| 5013693 | Formation of microstructures with removal of liquid by freezing and sublimation | Henry Guckel | 1991-05-07 |