Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7004198 | Micro-fluidic interconnect | Murat Okandan, Paul C. Galambos, Gilbert L. Benavides | 2006-02-28 |
| 6808952 | Process for fabricating a microelectromechanical structure | Jeffry J. Sniegowski, Thomas W. Krygowski, Seethambal S. Mani, Scott D. Habermehl, James E. Stevens +2 more | 2004-10-26 |
| 5998298 | Use of chemical-mechanical polishing for fabricating photonic bandgap structures | James G. Fleming, Shawn-Yu Lin, Bradley K. Smith | 1999-12-07 |
| 5919548 | Chemical-mechanical polishing of recessed microelectromechanical devices | Carole C. Barron, Stephen Montague | 1999-07-06 |
| 5804084 | Use of chemical mechanical polishing in micromachining | Robert D. Nasby, Jeffry J. Sniegowski, Paul McWhorter, Christopher A. Apblett | 1998-09-08 |