Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10214415 | Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture | Benjamin Griffin, Peggy J. Clews | 2019-02-26 |
| 9546420 | Methods of depositing an alpha-silicon-carbide-containing film at low temperature | — | 2017-01-17 |
| 8357994 | Antifuse with a single silicon-rich silicon nitride insulating layer | Roger T. Apodaca | 2013-01-22 |
| 6808952 | Process for fabricating a microelectromechanical structure | Jeffry J. Sniegowski, Thomas W. Krygowski, Seethambal S. Mani, Dale L. Hetherington, James E. Stevens +2 more | 2004-10-26 |
| 6771083 | Poole-frenkel piezoconductive element and sensor | — | 2004-08-03 |
| 6174820 | Use of silicon oxynitride as a sacrificial material for microelectromechanical devices | Jeffry J. Sniegowski | 2001-01-16 |