Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6146910 | Target configuration and method for extraction of overlay vectors from targets having concealed features | Santos Mayo, Jeremiah R. Lowney | 2000-11-14 |
| 5923041 | Overlay target and measurement procedure to enable self-correction for wafer-induced tool-induced shift by imaging sensor means | Loren W. Linholm, Richard A. Allen | 1999-07-13 |
| 5920067 | Monocrystalline test and reference structures, and use for calibrating instruments | R. N. Ghoshtagore, Loren W. Linholm, Richard A. Allen, Jeffry J. Sniegowski, William B. Penzes +1 more | 1999-07-06 |
| 5857258 | Electrical test structure and method for measuring the relative locations of conductive features on an insulating substrate | William B. Penzes, Richard A. Allen, Loren W. Linholm, E. Clayton Teague | 1999-01-12 |
| 5699282 | Methods and test structures for measuring overlay in multilayer devices | Richard A. Allen | 1997-12-16 |
| 5684301 | Monocrystalline test structures, and use for calibrating instruments | R. N. Ghoshtagore, Loren W. Linholm, Richard A. Allen, Jeffry J. Sniegowski | 1997-11-04 |
| 5617340 | Method and reference standards for measuring overlay in multilayer structures, and for calibrating imaging equipment as used in semiconductor manufacturing | Richard A. Allen, Joseph J. Kopanski, Loren W. Linholm | 1997-04-01 |
| 5602492 | Electrical test structure and method for measuring the relative locations of conducting features on an insulating substrate | Loren W. Linholm, Richard A. Allen, E. Clayton Teague, William B. Penzes | 1997-02-11 |
| 5449953 | Monolithic microwave integrated circuit on high resistivity silicon | Harvey C. Nathanson, Thomas J. Smith, Lewis R. Lowry, Jr., Maurice H. Hanes | 1995-09-12 |
| 5383136 | Electrical test structure and method for measuring the relative locations of conducting features on an insulating substrate | Richard A. Allen, Loren W. Linholm, Michael Gaitan | 1995-01-17 |
| 5373232 | Method of and articles for accurately determining relative positions of lithographic artifacts | Richard A. Allen, Loren W. Linholm, Colleen H. Ellenwood, William B. Penzes, E. Clayton Teague | 1994-12-13 |
| 5247262 | Linewidth micro-bridge test structure | Richard A. Allen, Loren W. Linholm | 1993-09-21 |
| 5218211 | System for sampling the sizes, geometrical distribution, and frequency of small particles accumulating on a solid surface | Richard A. Allen, Loren W. Linholm, Martin C. Peckerar | 1993-06-08 |
| 5043631 | Thin film electroluminescent edge emitter structure on a silicon substrate | Zoltan K. Kun, Richard H. Hopkins | 1991-08-27 |
| 5004956 | Thin film electroluminescent edge emitter structure on a silcon substrate | Zoltan K. Kun, Richard H. Hopkins | 1991-04-02 |
| 4904831 | Mitered mechanical switches | Harvey C. Nathanson, Michael C. Driver, Ronald G. Freitag, Donald K. Alexander, Daniel F. Yaw | 1990-02-27 |
| 4894114 | Process for producing vias in semiconductor | Harvey C. Nathanson, Michael C. Driver, Ronald G. Freitag, Donald K. Alexander, Daniel F. Yaw | 1990-01-16 |
| 4823136 | Transmit-receive means for phased-array active antenna system using rf redundancy | Harvey C. Nathanson, Michael C. Driver, Ronald G. Freitag, Donald K. Alexander, Daniel F. Yaw | 1989-04-18 |
| 4224083 | Dynamic isolation of conductivity modulation states in integrated circuits | — | 1980-09-23 |
| 4204116 | Light activated switch system having high di/dt capability | Richard J. Fiedor | 1980-05-20 |