Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5923041 | Overlay target and measurement procedure to enable self-correction for wafer-induced tool-induced shift by imaging sensor means | Michael W. Cresswell, Richard A. Allen | 1999-07-13 |
| 5920067 | Monocrystalline test and reference structures, and use for calibrating instruments | Michael W. Cresswell, R. N. Ghoshtagore, Richard A. Allen, Jeffry J. Sniegowski, William B. Penzes +1 more | 1999-07-06 |
| 5857258 | Electrical test structure and method for measuring the relative locations of conductive features on an insulating substrate | William B. Penzes, Richard A. Allen, Michael W. Cresswell, E. Clayton Teague | 1999-01-12 |
| 5684301 | Monocrystalline test structures, and use for calibrating instruments | Michael W. Cresswell, R. N. Ghoshtagore, Richard A. Allen, Jeffry J. Sniegowski | 1997-11-04 |
| 5617340 | Method and reference standards for measuring overlay in multilayer structures, and for calibrating imaging equipment as used in semiconductor manufacturing | Michael W. Cresswell, Richard A. Allen, Joseph J. Kopanski | 1997-04-01 |
| 5602492 | Electrical test structure and method for measuring the relative locations of conducting features on an insulating substrate | Michael W. Cresswell, Richard A. Allen, E. Clayton Teague, William B. Penzes | 1997-02-11 |
| 5383136 | Electrical test structure and method for measuring the relative locations of conducting features on an insulating substrate | Michael W. Cresswell, Richard A. Allen, Michael Gaitan | 1995-01-17 |
| 5373232 | Method of and articles for accurately determining relative positions of lithographic artifacts | Michael W. Cresswell, Richard A. Allen, Colleen H. Ellenwood, William B. Penzes, E. Clayton Teague | 1994-12-13 |
| 5247262 | Linewidth micro-bridge test structure | Michael W. Cresswell, Richard A. Allen | 1993-09-21 |
| 5218211 | System for sampling the sizes, geometrical distribution, and frequency of small particles accumulating on a solid surface | Michael W. Cresswell, Richard A. Allen, Martin C. Peckerar | 1993-06-08 |