Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Processing systems and methods for halide scavenging

Processing systems and methods for halide scavenging

US Patent 9991134 · Granted Jun 5, 2018

Estimated economic value: $36,422,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Brake mechanism for a radial piston unit2025
Self-aligned wide backside power rail contacts to multiple transistor sources2025
Extreme uniformity heated substrate support assembly2025
Display substrate and manufacturing method therefor, and display device2025
Selective etching between silicon-and-germanium-containing materials with varyin2025
Selective etching between silicon-and-germanium-containing materials with varyin2025
Selective etching between silicon-and-germanium-containing materials with varyin2025
Selective etching between silicon-and-germanium-containing materials with varyin2025
Semiconductor chamber components with advanced dual layer nickel-containing coat2025
Ion extraction optics having non uniform grid assembly2025
Selective etching of silicon-and-germanium-containing materials with increased s2025
Selective etching of silicon-and-germanium-containing materials with increased s2025