Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods

Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods

US Patent 9986598 · Granted May 29, 2018

Estimated economic value: $37,048,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Increasing the gas efficiency for an electrostatic chuck2025
Atomic layer deposition coating system for inner walls of gas lines2025
Extreme uniformity heated substrate support assembly2025
Semiconductor substrate support with internal channels2025
Methods of operating a spatial deposition tool2025
Atomic layer deposition coatings for high temperature ceramic components2025
Mainframe of dual-robot substrate processing system2025
Plasma chamber with multiphase rotating independent gas cross-flow with reduced 2025
Substrate support with real time force and film stress control2025
Substrate support with real time force and film stress control2025
Modular substrate support assembly2025
Parallel atomic layer deposition of target element interiors2025