TDI sensor in a darkfield system

Assignee

• Kla-Tencor

Inventors

• Jijen Vazhaeparambil (3 patents)
• Guoheng Zhao (92 patents)
• Daniel Kavaldjiev (33 patents)
• Anatoly Romanovsky (28 patents)
• Ivan Maleev (19 patents)
• Christian Wolters (40 patents)
• Stephen Biellak (36 patents)
• Bret Whiteside (15 patents)
• Donald Pettibone (20 patents)
• Yung-Ho Alex Chuang (163 patents)
• Unknown

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