Stage system and a lithographic apparatus

Assignee

• Asml Netherlands B.V.
• Philips

Inventors

• Bastiaan Lambertus Wilhelmus Marinus Van De Ven (23 patents)
• Antonius Franciscus Johannes De Groot (29 patents)
• Johannes Petrus Martinus Bernardus Vermeulen (69 patents)
• Theodorus Petrus Maria Cadee (54 patents)
• Robertus Mathijs Gerardus Rijs (9 patents)
• Richard Henricus Adrianus Van Lieshout (9 patents)

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