Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure

Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure

US Patent 9618835 · Granted Apr 11, 2017

Estimated economic value: $6,855,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Treatment planning for focal therapy treatments2025
Planning apparatus for determining an ablation probe parameter for a single abla2025
Measurement system and method for characterizing a patterning device2025
Fluid handling system, method and lithographic apparatus2025
Temperature conditioning system, a lithographic apparatus and a method of temper2025
Determining ablation probe configuration2025
Pressure control valve, a fluid handling structure for lithographic apparatus an2025
Fluid handling system, method and lithographic apparatus2025
Lithography apparatus and a method of manufacturing a device2025
Substrate table, immersion lithographic apparatus and device manufacturing metho2025
Substrate table, immersion lithographic apparatus and device manufacturing metho2025
Lithographic apparatus and device manufacturing method2024