Substrate table, immersion lithographic apparatus and device manufacturing method

Assignee

• Asml Netherlands B.V.

Inventors

• Marco Koert Stavenga (61 patents)
• Sergei Shulepov (38 patents)
• Koen Steffens (34 patents)
• Matheus Anna Karel Van Lierop (5 patents)
• Samuel Bertrand Dominique David (5 patents)
• David Bessems (21 patents)

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