Interfacial capping layers for interconnects

Assignee

• Novellus Systems

Inventors

• Jengyi Yu (36 patents)
• Hui-Jung Wu (43 patents)
• Unknown
• Bart J. van Schravendijk (126 patents)
• Pramod Subramonium (34 patents)
• Gengwei Jiang (6 patents)
• George Andrew Antonelli (40 patents)
• Jennifer O'Loughlin (15 patents)

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