Impurity reduction in silicon-containing films

Assignee

• Lam Research

Inventors

• Awnish Gupta (7 patents)
• Bart J. van Schravendijk (126 patents)
• Jason Alexander Varnell (1 patents)
• Joseph R. Abel (21 patents)
• Jennifer Leigh Petraglia (15 patents)
• Adrien LaVoie (177 patents)

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