Tin oxide films in semiconductor device manufacturing

Assignee

• Lam Research

Inventors

• Jengyi Yu (36 patents)
• Sandra Liliana Tan (5 patents)
• Unknown
• Hui-Chin Wu (7 patents)
• Richard Wise (36 patents)
• Yan-Quan Pan (11 patents)
• Nader Shamma (25 patents)
• Boris Volosskiy (14 patents)

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