Metal / metal nitride barrier layer for semiconductor device applications

Assignee

• Applied Materials

Inventors

• Peijun Ding (104 patents)
• Zheng Xu (110 patents)
• Hong Mei Zhang (87 patents)
• Xianmin Tang (97 patents)
• Praburam Gopalraja (75 patents)
• Suraj Rengarajan (17 patents)
• John C. Forster (98 patents)
• Jianming Fu (97 patents)
• Tony P. Chiang (270 patents)
• Gongda Yao (31 patents)
• Fusen Chen (103 patents)
• Barry Chin (76 patents)
• Gene Y. Kohara (16 patents)

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