Method for forming underlying insulation film

Assignee

• Tokyo Electron Limited

Inventors

• Takuya Sugawara (29 patents)
• Yoshihide Tada (11 patents)
• Genji Nakamura (21 patents)
• Shigenori Ozaki (29 patents)
• Toshio Nakanishi (52 patents)
• Masaru Sasaki (78 patents)
• Seiji Matsuyama (24 patents)
• Kazuhide Hasebe (97 patents)
• Shigeru Nakajima (101 patents)
• Tomonori Fujiwara (15 patents)

View full patent text on Google Patents →