Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Mask-making using resist having SIO bond-containing polymer

Mask-making using resist having SIO bond-containing polymer

US Patent 6420084 · Granted Jul 16, 2002

Estimated economic value: $9,944,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Underground pipe leak detection system and method2025
Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-laye2025
Administration of benzodiazepine compositions2025
Administration of benzodiazepine compositions2025
Administration of benzodiazepine compositions2025
Tin oxide thin film spacers in semiconductor device manufacturing2024
Chamfer-less via integration scheme2024
Selective deposition of etch-stop layer for enhanced patterning2024
Administration of benzodiazepine compositions2023
Tin oxide thin film spacers in semiconductor device manufacturing2023
Administration of benzodiazepine compositions2022
Graphical user interface based feature extraction application for machine learni2022