Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity

Assignee

• Applied Materials

Inventors

• Dhritiman Subha Kashyap (21 patents)
• Chaowei Wang (8 patents)
• Kartik Shah (68 patents)
• Kevin Griffin (36 patents)
• Karthik Ramanathan (21 patents)
• Hanhong Chen (68 patents)
• Joseph AuBuchon (41 patents)
• Sanjeev Baluja (104 patents)

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