Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus

Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus

US Patent 11143969 · Granted Oct 12, 2021

Estimated economic value: $55,748,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Membrane for EUV lithography2025
Measurement system and method for characterizing a patterning device2025
Fluid handling system, method and lithographic apparatus2025
Fluid handling system, method and lithographic apparatus2025
Fluid handling system, method and lithographic apparatus2025
Pressure control valve, a fluid handling structure for lithographic apparatus an2025
Fluid handling system, method and lithographic apparatus2025
Fluid handling system, method and lithographic apparatus2025
Lithography apparatus and a method of manufacturing a device2025
Lithography apparatus and a method of manufacturing a device2025
Lithography apparatus and a method of manufacturing a device2025
Method for decision making in a semiconductor manufacturing process2025