Method for decision making in a semiconductor manufacturing process

Assignee

• Asml Netherlands B.V.

Inventors

• Arnaud HUBAUX (3 patents)
• Johan Franciscus Maria Beckers (7 patents)
• Dylan John David Davies (4 patents)
• Johan Gertrudis Cornelis Kunnen (33 patents)
• Willem Richard Pongers (9 patents)
• Ajinkya Ravindra Daware (2 patents)
• Chung-Hsun Li (8 patents)
• Georgios TSIROGIANNIS (7 patents)
• Hendrik Cornelis Anton Borger (3 patents)
• Frederik Eduard De Jong (21 patents)
• Juan Manuel Gonzalez Huesca (3 patents)
• Andriy Hlod (2 patents)
• Maxim PISARENCO (23 patents)

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