Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films

Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films

US Patent 10490436 · Granted Nov 26, 2019

Estimated economic value: $24,423,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Gas distribution plate2025
Gas distribution plate2025
Ion implantation for reduced hydrogen incorporation in amorphous silicon2025
Methods of operating a spatial deposition tool2025
Plasma showerhead assembly and method of reducing defects2025
High conductance variable orifice valve2025
Gas distribution plate2025
Shaped showerhead for edge plasma modulation2025
Gas mixer2025
Integration processes utilizing boron-doped silicon materials2025
Dithering or dynamic offsets for improved uniformity2025
Apparatus and methods for fine planar non-uniformity improvement2025