Dual-channel showerhead for formation of film stacks

Assignee

• Applied Materials

Inventors

• Kaushik Alayavalli (15 patents)
• Xinhai Han (45 patents)
• Praket P. Jha (31 patents)
• Masaki Ogata (16 patents)
• Zhijun Jiang (22 patents)
• Allen Ko (15 patents)
• Ndanka O. Mukuti (7 patents)
• Thuy Britcher (4 patents)
• Amit Kumar BANSAL (84 patents)
• Ganesh Balasubramanian (114 patents)
• Juan Carlos Rocha-Alvarez (153 patents)
• Bok Hoen Kim (77 patents)

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