PECVD apparatus for in-situ deposition of film stacks

Assignee

• Novellus Systems

Inventors

• Jason Dirk Haverkamp (6 patents)
• Pramod Subramonium (34 patents)
• Joseph L. Womack (9 patents)
• Dong Niu (15 patents)
• Keith Fox (20 patents)
• John B. Alexy (8 patents)
• Patrick Breiling (22 patents)
• Jennifer Leigh Petraglia (15 patents)
• Mandyam Sriram (58 patents)
• George Andrew Antonelli (40 patents)
• Bart J. van Schravendijk (126 patents)

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