Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8592328 | Method for depositing a chlorine-free conformal sin film | Dennis M. Hausmann, Jon Henri, Bart van Schravendijk | 2013-11-26 |
| 8137467 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson | 2012-03-20 |
| 8043667 | Method to improve mechanical strength of low-K dielectric film using modulated UV exposure | Ananda K. Bandyopadhyay, Seon-Mee Cho, Haiying Fu, David Mordo | 2011-10-25 |
| 7906174 | PECVD methods for producing ultra low-k dielectric films using UV treatment | Qingguo Wu, Dan Vitkavage | 2011-03-15 |
| 7695765 | Methods for producing low-stress carbon-doped oxide films with improved integration properties | Keith Fox, Carole Mars, Willis Kirkpatrick | 2010-04-13 |
| 7622400 | Method for improving mechanical properties of low dielectric constant materials | Keith Fox, David Mordo, Qingguo Wu | 2009-11-24 |
| 7611757 | Method to improve mechanical strength of low-K dielectric film using modulated UV exposure | Ananda K. Bandyopadhyay, Seon-Mee Cho, Haiying Fu, David Mordo | 2009-11-03 |
| 7265061 | Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical properties | Seon-Mee Cho, Brian Lu, David Mordo | 2007-09-04 |
| 7253125 | Method to improve mechanical strength of low-k dielectric film using modulated UV exposure | Ananda K. Bandyopadhyay, Seon-Mee Cho, Haiying Fu, David Mordo | 2007-08-07 |