Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7726051 | Wheel-type working machine and method of controlling the same | Masaaki Imaizumi | 2010-06-01 |
| 6744511 | Stage device having drive mechanism for driving a movable stage, and exposure apparatus and method of detecting position of the stage | Kazuaki Saiki | 2004-06-01 |
| 6570641 | Projection exposure apparatus | Hiroshi Shirasu, Yukio Kakizaki, Kinya Kato | 2003-05-27 |
| RE37762 | Scanning exposure apparatus and exposure method | Seiji Miyazaki, Kei Nara, Masami Seki, Masamitsu Yanagihara | 2002-06-25 |
| 6317196 | Projection exposure apparatus | Hiroshi Shirasu, Yukio Kakizaki, Kinya Kats | 2001-11-13 |
| 6266131 | Exposure apparatus | Hiroshi Shirasu | 2001-07-24 |
| 6084244 | Scanning exposure apparatus that compensates for positional deviation caused by substrate inclination | Kazuaki Saiki | 2000-07-04 |
| 5923409 | Scanning-type exposure apparatus including a vertically disposed holder surface and method thereof | Hiroshi Shirasu | 1999-07-13 |
| 5920378 | Projection exposure apparatus | Masaichi Murakami, Hiroshi Shirasu, Kazuaki Saiki, Susumu Mori | 1999-07-06 |
| 5777722 | Scanning exposure apparatus and method | Seiji Miyazaki, Tsuyoshi Narabe, Kei Nara, Kazuaki Saiki, Hideji Goto +1 more | 1998-07-07 |
| 5581075 | Multi-beam scanning projection exposure apparatus and method with beam monitoring and control for uniform exposure of large area | Tsuyoshi Naraki, Masamitsu Yanagihara, Hiroshi Shirasu, Tetsuo Kikuchi, Noriaki Yamamoto | 1996-12-03 |
| 5523574 | Exposure apparatus | Hiroshi Shirasu | 1996-06-04 |
| 4782239 | Optical position measuring apparatus | Hideo Hirose | 1988-11-01 |