Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5777721 | Exposure method and apparatus with control of a linear motor | — | 1998-07-07 |
| 5742376 | Projection exposure apparatus and projection exposure method | — | 1998-04-21 |
| 5714860 | Stage device capable of applying a damping force to a movable member | — | 1998-02-03 |
| 5699145 | Scanning type exposure apparatus | Toshio Ueda | 1997-12-16 |
| 5677754 | Scanning exposure apparatus | — | 1997-10-14 |
| 5483311 | Projection exposure apparatus | Yasuyuki Sakakibara, Nobutaka Magome, Naomasa Shiraishi | 1996-01-09 |
| 5446519 | Stage device | — | 1995-08-29 |
| 5343270 | Projection exposure apparatus | Yasuyuki Sakakibara, Nobutaka Magome, Naomasa Shiraishi | 1994-08-30 |
| 4958082 | Position measuring apparatus | Toshikazu Umatate | 1990-09-18 |
| 4860374 | Apparatus for detecting position of reference pattern | Seiro Murakami, Akikazu Tanimoto, Hidemi Kawai, Masaichi Murakami | 1989-08-22 |
| 4801977 | Projection optical apparatus | Shoji Ishizaka, Hideo Mizutani, Akikazu Tanimoto | 1989-01-31 |