Issued Patents All Time
Showing 101–125 of 128 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534777 | Surface position detecting system and method having a sensor selection | Shigeyuki Uzawa | 2003-03-18 |
| 6531706 | Surface position detecting system and method having an optimum value | Shigeyuki Uzawa | 2003-03-11 |
| 6426508 | Surface-position detection device, a projection exposure apparatus using the device, and a device manufacturing method using the apparatus | Yuji Kosugi | 2002-07-30 |
| 6236447 | Exposure method and apparatus, and semiconductor device manufactured using the method | Atsushi Kawahara | 2001-05-22 |
| 6163369 | Plane position detecting method and exposing method and exposure apparatus using same | Atsushi Kawahara | 2000-12-19 |
| 6160414 | Method for diagnosing abnormality of circuit member of inverter driving controller for driving and controlling motor | Shunsuke Matsubara | 2000-12-12 |
| 6130751 | Positioning method and apparatus | Kuniyasu Haginiwa | 2000-10-10 |
| 6116887 | Foam molding equipment | Osamu Shimomura, Masaki Yonezawa, Hirozi Kamiya, Ken Ohshima | 2000-09-12 |
| 6081614 | Surface position detecting method and scanning exposure method using the same | Shigeyuki Uzawa | 2000-06-27 |
| 5925887 | Projection exposure apparatus including an optical characteristic detector for detecting a change in optical characteristic of a projection optical system and device manufacturing method using the same | Fumio Sakai, Kazuhito Outsuka, Kazuhiro Takahashi, Yasuo Hasegawa, Hideki Nogawa +1 more | 1999-07-20 |
| 5920398 | Surface position detecting method and scanning exposure method using the same | Takehiko Iwanaga, Shigeyuki Uzawa | 1999-07-06 |
| 5891585 | Nb.sub.3 Al multi-filamentary superconducting wire | Naoki Ayai, Akira Mikumo, Kenichi Takahashi, Norikiyo Koizumi, Toshinari Ando +2 more | 1999-04-06 |
| 5793471 | Projection exposure method and apparatus in which scanning exposure is performed in accordance with a shot layout of mask patterns | Tsuneo Kanda, Shigeyuki Uzawa | 1998-08-11 |
| 5751428 | Exposure method and exposure apparatus using the same | Yoshiharu Kataoka, Haruna Kawashima | 1998-05-12 |
| 5638289 | Method and apparatus allowing hot replacement of circuit boards | Hirohiko Kizu | 1997-06-10 |
| 5628836 | Method of preparing Nb.sub.3 Al superconducting wire | Naoki Ayai | 1997-05-13 |
| 5554448 | Wire for Nb.sub.3 X superconducting wire | Naoki Ayai | 1996-09-10 |
| 5504984 | Methods of manufacturing Nb.sub.3 Al superconducting wire and coil | Toshinari Ando, Yoshikazu Takahashi, Masataka Nishi, Hiroshi Tsuji, Hideo Nakajima | 1996-04-09 |
| 5491127 | Composite superconductor and method of the production thereof | Minoru Yokota, Masayuki Nagata, Shigeo Saito | 1996-02-13 |
| 5426093 | Composite superconductor and method of the production thereof | Minoru Yokota, Masasyuki Nagata, Shigeo Saito | 1995-06-20 |
| 5361122 | Autofocusing device and projection exposure apparatus with the same | Yoshiharu Kataoka, Akiyoshi Suzuki | 1994-11-01 |
| 5323016 | Focusing method | Yoshiharu Kataoka, Hiroyoshi Kubo, Haruna Kawashima | 1994-06-21 |
| 5253647 | Insertion position and orientation state pickup for endoscope | Yutaka Takahashi, Yoshikatsu Nagayama, Hiroki Hibino, Katsunori Sakiyama, Yoshihito Shimizu +7 more | 1993-10-19 |
| 5088082 | Dust removing system for optical disk device | Kazuo Ikeda, Kouichi Ihara | 1992-02-11 |
| 4976601 | Die exchanger of molding apparatus | Kozo Tsuruta | 1990-12-11 |