Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287569 | Pellicle film for photolithography, pellicle, photolithography mask, photolithography system, and method of producing pellicle film for photolithography | Yousuke ONO, Hisako ISHIKAWA, Ryohei Ogawa, Atsushi Okubo, Atsuko Sekiguchi +3 more | 2025-04-29 |
| 12271109 | Pellicle demounting method, and pellicle demounting device | Akira Ishikawa | 2025-04-08 |
| 11859110 | Substrate laminated body and method of manufacturing substrate laminated body | Jun Kamada, Yasuhisa Kayaba | 2024-01-02 |
| 11852968 | Pellicle, exposure master, exposure device and method for manufacturing semiconductor device | Yosuke Ono, Atsushi Okubo, Daiki Taneichi, Hisako ISHIKAWA, Tsuneaki Biyajima | 2023-12-26 |
| 11581197 | Method for producing semiconductor device and intermediate for semiconductor device | Jun Kamada, Kaichiro Haruta, Yasuhisa Kayaba, Yoichi Kodama | 2023-02-14 |
| 11332643 | Adhesive member and production method for adhesive member | Jun Kamada, Tomoya Matayoshi, Michio Eriguchi, Kaichiro Haruta, Kenichi Fujii +1 more | 2022-05-17 |
| 11243463 | Supporting frame for pellicle, pellicle, method for manufacturing same, exposure master using same, and method for manufacturing semiconductor device | Akira Ishikawa, Atsushi Okubo, Yosuke Ono | 2022-02-08 |
| 11204547 | Pellicle support frame, pellicle, method for manufacturing pellicle support frame, and exposure original plate and exposure device employing pellicle | Akira Ishikawa, Atsushi Okubo, Yosuke Ono | 2021-12-21 |
| 11137677 | Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method | Yosuke Ono, Atsushi Okubo, Daiki Taneichi, Hisako ISHIKAWA, Tsuneaki Biyajima | 2021-10-05 |
| 11042085 | Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device | Yosuke Ono, Atsushi Okubo, Atsuko Sekiguchi, Yuichi Kato, Takeo Yamada | 2021-06-22 |
| 10988647 | Semiconductor substrate manufacturing method, semiconductor device, and method for manufacturing same | Jun Kamada, Kaichiro Haruta, Takashi UNEZAKI, Kiyomi Imagawa, Kenichi Fujii +1 more | 2021-04-27 |
| 10955740 | Pellicle frame and pellicle | Yoshihiro Taguchi, Daiki Taneichi | 2021-03-23 |
| 10895805 | Pellicle manufacturing method and method for manufacturing photomask with pellicle | Daiki Taneichi, Yosuke Ono, Hisako ISHIKAWA, Tsuneaki Biyajima, Yasuyuki Sato +1 more | 2021-01-19 |
| 10606169 | Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle | Takashi Kozeki, Daiki Taneichi, Shintaro Maekawa, Yosuke Ono, Tsuneaki Biyajima | 2020-03-31 |
| 10585348 | Pellicle, pellicle production method and exposure method using pellicle | Daiki Taneichi, Takashi Kozeki, Yosuke Ono, Hisako ISHIKAWA, Tsuneaki Biyajima +3 more | 2020-03-10 |
| 10488751 | Pellicle, production method thereof, exposure method | Daiki Taneichi, Yosuke Ono, Hisako ISHIKAWA, Tsuneaki Biyajima, Atsushi Okubo +2 more | 2019-11-26 |
| 10261411 | Pellicle film, pellicle frame, pellicle, and method for producing same | Atsushi Okubo, Tsuneaki Biyajima, Yosuke Ono, Yasuhisa Fujii, Nobuko MATSUMOTO | 2019-04-16 |
| 10216081 | Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor device | Yosuke Ono, Daiki Taneichi, Yasuyuki Sato, Toshiaki Hirota | 2019-02-26 |
| 10108084 | Pellicle membrane, pellicle, original plate for exposure, exposure apparatus, and method of producing semiconductor device | Yosuke Ono | 2018-10-23 |
| 10020238 | Method for manufacturing composite body and composition | Yasuhisa Kayaba, Shoko Ono, Hirofumi Tanaka, Tsuneji Suzuki, Shigeru Mio | 2018-07-10 |
| 9841670 | Support frame for pellicles | Yosuke Ono, Daiki Taneichi, Yasuyuki Sato, Toshiaki Hirota, Kiyokazu Koga | 2017-12-12 |
| 9780008 | Semiconductor device, method for manufacturing the same, and rinsing liquid | Shoko Ono, Yasuhisa Kayaba, Hirofumi Tanaka, Tsuneji Suzuki | 2017-10-03 |
| 9703187 | Pellicle and EUV exposure device comprising same | Yosuke Ono | 2017-07-11 |
| 9169353 | Sealing composition for semiconductor, semiconductor device and method of producing the same, and polymer and method of producing the same | Shoko Ono, Yasuhisa Kayaba, Hirofumi Tanaka, Tsuneji Suzuki, Shigeru Mio | 2015-10-27 |
| 8956977 | Semiconductor device production method and rinse | Shoko Ono, Hirofumi Tanaka | 2015-02-17 |