Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287569 | Pellicle film for photolithography, pellicle, photolithography mask, photolithography system, and method of producing pellicle film for photolithography | Yousuke ONO, Hisako ISHIKAWA, Ryohei Ogawa, Atsushi Okubo, Kazuo Kohmura +3 more | 2025-04-29 |
| 11042085 | Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device | Yosuke Ono, Atsushi Okubo, Kazuo Kohmura, Yuichi Kato, Takeo Yamada | 2021-06-22 |
| 10023715 | Elastomer structure containing carbon nanotubes and method for producing the same | Kenji Hata | 2018-07-17 |