Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287569 | Pellicle film for photolithography, pellicle, photolithography mask, photolithography system, and method of producing pellicle film for photolithography | Yousuke ONO, Ryohei Ogawa, Atsushi Okubo, Kazuo Kohmura, Atsuko Sekiguchi +3 more | 2025-04-29 |
| 11852968 | Pellicle, exposure master, exposure device and method for manufacturing semiconductor device | Yosuke Ono, Kazuo Kohmura, Atsushi Okubo, Daiki Taneichi, Tsuneaki Biyajima | 2023-12-26 |
| 11137677 | Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method | Kazuo Kohmura, Yosuke Ono, Atsushi Okubo, Daiki Taneichi, Tsuneaki Biyajima | 2021-10-05 |
| 10895805 | Pellicle manufacturing method and method for manufacturing photomask with pellicle | Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Tsuneaki Biyajima, Yasuyuki Sato +1 more | 2021-01-19 |
| 10585348 | Pellicle, pellicle production method and exposure method using pellicle | Kazuo Kohmura, Daiki Taneichi, Takashi Kozeki, Yosuke Ono, Tsuneaki Biyajima +3 more | 2020-03-10 |
| 10488751 | Pellicle, production method thereof, exposure method | Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Tsuneaki Biyajima, Atsushi Okubo +2 more | 2019-11-26 |
| 10106660 | Film containing a resin having a thiourethane bond and uses thereof | Toshinori Matsuda, Yosuke Ono, Kazuo Yagi, Akifumi Kagayama | 2018-10-23 |