Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12344773 | Mask adhesive and pellicle comprising same | Daiki Taneichi | 2025-07-01 |
| 11852968 | Pellicle, exposure master, exposure device and method for manufacturing semiconductor device | Yosuke Ono, Kazuo Kohmura, Atsushi Okubo, Daiki Taneichi, Hisako ISHIKAWA | 2023-12-26 |
| 11137677 | Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method | Kazuo Kohmura, Yosuke Ono, Atsushi Okubo, Daiki Taneichi, Hisako ISHIKAWA | 2021-10-05 |
| 10895805 | Pellicle manufacturing method and method for manufacturing photomask with pellicle | Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Hisako ISHIKAWA, Yasuyuki Sato +1 more | 2021-01-19 |
| 10606169 | Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle | Kazuo Kohmura, Takashi Kozeki, Daiki Taneichi, Shintaro Maekawa, Yosuke Ono | 2020-03-31 |
| 10585348 | Pellicle, pellicle production method and exposure method using pellicle | Kazuo Kohmura, Daiki Taneichi, Takashi Kozeki, Yosuke Ono, Hisako ISHIKAWA +3 more | 2020-03-10 |
| 10488751 | Pellicle, production method thereof, exposure method | Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Hisako ISHIKAWA, Atsushi Okubo +2 more | 2019-11-26 |
| 10261411 | Pellicle film, pellicle frame, pellicle, and method for producing same | Atsushi Okubo, Yosuke Ono, Kazuo Kohmura, Yasuhisa Fujii, Nobuko MATSUMOTO | 2019-04-16 |