Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12344773 | Mask adhesive and pellicle comprising same | Tsuneaki Biyajima | 2025-07-01 |
| 11852968 | Pellicle, exposure master, exposure device and method for manufacturing semiconductor device | Yosuke Ono, Kazuo Kohmura, Atsushi Okubo, Hisako ISHIKAWA, Tsuneaki Biyajima | 2023-12-26 |
| 11137677 | Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method | Kazuo Kohmura, Yosuke Ono, Atsushi Okubo, Hisako ISHIKAWA, Tsuneaki Biyajima | 2021-10-05 |
| 10955740 | Pellicle frame and pellicle | Yoshihiro Taguchi, Kazuo Kohmura | 2021-03-23 |
| 10895805 | Pellicle manufacturing method and method for manufacturing photomask with pellicle | Kazuo Kohmura, Yosuke Ono, Hisako ISHIKAWA, Tsuneaki Biyajima, Yasuyuki Sato +1 more | 2021-01-19 |
| 10606169 | Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle | Kazuo Kohmura, Takashi Kozeki, Shintaro Maekawa, Yosuke Ono, Tsuneaki Biyajima | 2020-03-31 |
| 10585348 | Pellicle, pellicle production method and exposure method using pellicle | Kazuo Kohmura, Takashi Kozeki, Yosuke Ono, Hisako ISHIKAWA, Tsuneaki Biyajima +3 more | 2020-03-10 |
| 10488751 | Pellicle, production method thereof, exposure method | Kazuo Kohmura, Yosuke Ono, Hisako ISHIKAWA, Tsuneaki Biyajima, Atsushi Okubo +2 more | 2019-11-26 |
| 10216081 | Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor device | Kazuo Kohmura, Yosuke Ono, Yasuyuki Sato, Toshiaki Hirota | 2019-02-26 |
| 9841670 | Support frame for pellicles | Kazuo Kohmura, Yosuke Ono, Yasuyuki Sato, Toshiaki Hirota, Kiyokazu Koga | 2017-12-12 |
| 8945799 | Pellicle and mask adhesive agent for use in same | Takashi Kozeki, Akihiro Koide | 2015-02-03 |
| 7977429 | Polymers and uses thereof | Naoshi Nagai, Masahiko Mitsuzuka, Kazuoki Nakai, Motoaki Isokawa, Shiro Nakatsuka +2 more | 2011-07-12 |
| 7291672 | Paste composition and uses thereof | Manabu Tsuruta, Masahiko Mitsuduka | 2007-11-06 |