Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10895805 | Pellicle manufacturing method and method for manufacturing photomask with pellicle | Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Hisako ISHIKAWA, Tsuneaki Biyajima +1 more | 2021-01-19 |
| 10585348 | Pellicle, pellicle production method and exposure method using pellicle | Kazuo Kohmura, Daiki Taneichi, Takashi Kozeki, Yosuke Ono, Hisako ISHIKAWA +3 more | 2020-03-10 |
| 10488751 | Pellicle, production method thereof, exposure method | Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Hisako ISHIKAWA, Tsuneaki Biyajima +2 more | 2019-11-26 |
| 10216081 | Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor device | Kazuo Kohmura, Yosuke Ono, Daiki Taneichi, Yasuyuki Sato | 2019-02-26 |
| 9841670 | Support frame for pellicles | Kazuo Kohmura, Yosuke Ono, Daiki Taneichi, Yasuyuki Sato, Kiyokazu Koga | 2017-12-12 |