Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10606169 | Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle | Kazuo Kohmura, Daiki Taneichi, Shintaro Maekawa, Yosuke Ono, Tsuneaki Biyajima | 2020-03-31 |
| 10585348 | Pellicle, pellicle production method and exposure method using pellicle | Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Hisako ISHIKAWA, Tsuneaki Biyajima +3 more | 2020-03-10 |
| 8945799 | Pellicle and mask adhesive agent for use in same | Daiki Taneichi, Akihiro Koide | 2015-02-03 |
| 8815476 | Pellicle membrane | — | 2014-08-26 |
| 8685598 | Pellicle and mask adhesive therefor | Shuichi Murakami, Minehiro Mori | 2014-04-01 |
| 8507158 | Pellicle frame and pellicle containing same | Shuichi Murakami | 2013-08-13 |