Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386252 | Pellicle film, pellicle, exposure original plate, exposure device, and method for manufacturing pellicle film | — | 2025-08-12 |
| 11852968 | Pellicle, exposure master, exposure device and method for manufacturing semiconductor device | Kazuo Kohmura, Atsushi Okubo, Daiki Taneichi, Hisako ISHIKAWA, Tsuneaki Biyajima | 2023-12-26 |
| 11243463 | Supporting frame for pellicle, pellicle, method for manufacturing same, exposure master using same, and method for manufacturing semiconductor device | Akira Ishikawa, Atsushi Okubo, Kazuo Kohmura | 2022-02-08 |
| 11204547 | Pellicle support frame, pellicle, method for manufacturing pellicle support frame, and exposure original plate and exposure device employing pellicle | Akira Ishikawa, Atsushi Okubo, Kazuo Kohmura | 2021-12-21 |
| 11137677 | Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method | Kazuo Kohmura, Atsushi Okubo, Daiki Taneichi, Hisako ISHIKAWA, Tsuneaki Biyajima | 2021-10-05 |
| 11042085 | Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device | Atsushi Okubo, Kazuo Kohmura, Atsuko Sekiguchi, Yuichi Kato, Takeo Yamada | 2021-06-22 |
| 10895805 | Pellicle manufacturing method and method for manufacturing photomask with pellicle | Kazuo Kohmura, Daiki Taneichi, Hisako ISHIKAWA, Tsuneaki Biyajima, Yasuyuki Sato +1 more | 2021-01-19 |
| 10606169 | Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle | Kazuo Kohmura, Takashi Kozeki, Daiki Taneichi, Shintaro Maekawa, Tsuneaki Biyajima | 2020-03-31 |
| 10585348 | Pellicle, pellicle production method and exposure method using pellicle | Kazuo Kohmura, Daiki Taneichi, Takashi Kozeki, Hisako ISHIKAWA, Tsuneaki Biyajima +3 more | 2020-03-10 |
| 10488751 | Pellicle, production method thereof, exposure method | Kazuo Kohmura, Daiki Taneichi, Hisako ISHIKAWA, Tsuneaki Biyajima, Atsushi Okubo +2 more | 2019-11-26 |
| 10261411 | Pellicle film, pellicle frame, pellicle, and method for producing same | Atsushi Okubo, Tsuneaki Biyajima, Kazuo Kohmura, Yasuhisa Fujii, Nobuko MATSUMOTO | 2019-04-16 |
| 10216081 | Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor device | Kazuo Kohmura, Daiki Taneichi, Yasuyuki Sato, Toshiaki Hirota | 2019-02-26 |
| 10108084 | Pellicle membrane, pellicle, original plate for exposure, exposure apparatus, and method of producing semiconductor device | Kazuo Kohmura | 2018-10-23 |
| 10106660 | Film containing a resin having a thiourethane bond and uses thereof | Hisako ISHIKAWA, Toshinori Matsuda, Kazuo Yagi, Akifumi Kagayama | 2018-10-23 |
| 9841670 | Support frame for pellicles | Kazuo Kohmura, Daiki Taneichi, Yasuyuki Sato, Toshiaki Hirota, Kiyokazu Koga | 2017-12-12 |
| 9776387 | Method for producing transparent adhesive sheet for optical applications, transparent adhesive sheet for optical applications, and display device using same | Tatsuya Nunokawa, Masanori Natsuka, Hiroshi Mataki | 2017-10-03 |
| 9703187 | Pellicle and EUV exposure device comprising same | Kazuo Kohmura | 2017-07-11 |
| 9242504 | Method and product of hydraulic transfer | Wataru Ikeda | 2016-01-26 |