Issued Patents All Time
Showing 151–175 of 448 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE39195 | Polishing pad refurbisher for in situ, real-time conditioning and cleaning of a polishing pad used in chemical-mechanical polishing of microelectronic substrates | Gurtej S. Sandhu | 2006-07-18 |
| 7078266 | Method for fabricating semiconductor components with thinned substrate, back side contacts and circuit side contacts | Alan G. Wood | 2006-07-18 |
| RE39126 | Two-step chemical mechanical polishing process for producing flush and protruding tungsten plugs | Chris C. Yu | 2006-06-13 |
| 7056806 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Ronald A. Weimer, Kevin L. Beaman, Lyle Breiner, Lingyi A. Zheng +3 more | 2006-06-06 |
| 7056194 | Semiconductor processing methods of removing conductive material | Scott Meikle | 2006-06-06 |
| 7049238 | Method for fabricating semiconductor device having recess | Tyler Lowrey | 2006-05-23 |
| 7030037 | Atomic layer deposition apparatus and method | Gurtej S. Sandhu | 2006-04-18 |
| 7029949 | Method for fabricating encapsulated semiconductor components having conductive vias | Warren M. Farnworth, Alan G. Wood | 2006-04-18 |
| 7022605 | Atomic layer deposition methods | Guy T. Blalock, Gurtej S. Sandhu | 2006-04-04 |
| 7012010 | Methods of forming trench isolation regions | Gurtej S. Sandhu | 2006-03-14 |
| 7009298 | Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer | Gurtej S. Sandhu, Tyler Lowrey | 2006-03-07 |
| 7001481 | Method and system providing high flux of point of use activated reactive species for semiconductor processing | Gurtej S. Sandhu | 2006-02-21 |
| 7001251 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Scott E. Moore | 2006-02-21 |
| 7001845 | Methods of treating surfaces of substrates | Scott E. Moore | 2006-02-21 |
| 6977097 | Particle forming methods | — | 2005-12-20 |
| 6974367 | Chemical mechanical polishing process | — | 2005-12-13 |
| 6964915 | Method of fabricating encapsulated semiconductor components by etching | Warren M. Farnworth, Alan G. Wood | 2005-11-15 |
| 6956210 | Methods for preparing samples for atom probe analysis | — | 2005-10-18 |
| 6953743 | Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer | Gurtej S. Sandhu, Tyler Lowrey | 2005-10-11 |
| 6949464 | Contact/via force fill techniques | — | 2005-09-27 |
| 6945857 | Polishing pad conditioner and methods of manufacture and recycling | Venkata R. Balagani, Kenny King-Tai Ngan | 2005-09-20 |
| 6916723 | Methods of forming rugged semiconductor-containing surfaces | Shenlin Chen, Guy T. Blalock, Lyle Breiner, Er-Xuan Ping | 2005-07-12 |
| 6916374 | Atomic layer deposition methods and atomic layer deposition tools | Gurtej S. Sandhu | 2005-07-12 |
| 6914310 | Semiconductor isolator system | Tyler Lowrey | 2005-07-05 |
| 6908784 | Method for fabricating encapsulated semiconductor components | Warren M. Farnworth, Alan G. Wood | 2005-06-21 |