Issued Patents All Time
Showing 101–125 of 198 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746952 | Diffusion barrier layer for semiconductor wafer fabrication | Ammar Derraa, Paul Castrovillo | 2004-06-08 |
| 6737328 | Methods of forming silicon dioxide layers, and methods of forming trench isolation regions | Gurtej S. Sandhu | 2004-05-18 |
| 6727173 | Semiconductor processing methods of forming an utilizing antireflective material layers, and methods of forming transistor gate stacks | Gurtej S. Sandhu | 2004-04-27 |
| 6706158 | Electrochemical mechanical planarization | — | 2004-03-16 |
| 6706116 | Method of forming a crystalline phase material | Gurtej S. Sandhu | 2004-03-16 |
| 6705246 | RF powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition | Gurtej S. Sandhu, Paul Smith, Mei Chang | 2004-03-16 |
| 6696368 | Titanium boronitride layer for high aspect ratio semiconductor devices | Ammar Derraa, Paul Castrovillo | 2004-02-24 |
| 6686288 | Integrated circuit having self-aligned CVD-tungsten/titanium contact plugs strapped with metal interconnect and method of manufacture | Kirk D. Prall, Howard E. Rhodes, Gurtel Sandhu, Philip J. Ireland | 2004-02-03 |
| 6653234 | Chemical vapor deposition of titanium from titanium tetrachloride and hydrocarbon reactants | Ravi Iyer | 2003-11-25 |
| 6642620 | Integrated circuits having low resistivity contacts and the formation thereof using an in situ plasma doping and clean | Gurtej S. Sandhu | 2003-11-04 |
| 6627465 | System and method for detecting flow in a mass flow controller | Gurtej S. Sandhu, Neal R. Rueger, Allen Mardian | 2003-09-30 |
| 6602785 | Method of forming a conductive contact on a substrate and method of processing a semiconductor substrate using an ozone treatment | Gurtej S. Sandhu, Terry L. Gilton | 2003-08-05 |
| 6597042 | Contact with germanium layer | Jeffrey W. Honeycutt | 2003-07-22 |
| 6554910 | Method for treating residues in semiconductor processing chambers | Gurtej S. Sandhu | 2003-04-29 |
| 6533894 | RF powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition | Gurtej S. Sandhu, Paul Smith, Mei Chang | 2003-03-18 |
| 6531352 | Methods of forming conductive interconnects | Gurtej S. Sandhu, Trung T. Doan, Howard E. Rhodes, Philip J. Ireland, Martin C. Roberts | 2003-03-11 |
| 6524975 | Combined gate cap or digit line and spacer deposition using HDP | Weimin Li, Gurtej S. Sandhu | 2003-02-25 |
| 6499425 | Quasi-remote plasma processing method and apparatus | Gurtej S. Sandhu, Anand Srinivasan | 2002-12-31 |
| 6488571 | Apparatus for enhanced rate chemical mechanical polishing with adjustable selectivity | — | 2002-12-03 |
| 6472756 | Method of forming titanium silicide and titanium by chemical vapor deposition and resulting apparatus | Trung T. Doan, Gurtej S. Sandhu, Kirk D. Prall | 2002-10-29 |
| 6468925 | Plasma enhanced chemical vapor deposition process | Philip Campbell, Craig M. Carpenter, Allen Mardian | 2002-10-22 |
| 6444556 | Chemistry for chemical vapor deposition of titanium containing films | Howard E. Rhodes, Philip J. Ireland, Gurtej S. Sandhu | 2002-09-03 |
| 6433430 | Contact structure having a diffusion barrier | Varatharajan Nagabushnam | 2002-08-13 |
| 6429071 | Method of increasing capacitance of memory cells incorporating hemispherical grained silicon | Thomas A. Figura, Anand Srinivasan, Gurtej S. Sandhu | 2002-08-06 |
| 6423626 | Removal of metal cusp for improved contact fill | Anand Srinivasan, Gurtej S. Sandhu | 2002-07-23 |