Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7468104 | Chemical vapor deposition apparatus and deposition method | Allen Mardian, Craig M. Carpenter, Randy Mercil, Sujit Sharan | 2008-12-23 |
| 7422986 | Deposition methods utilizing microwave excitation | Craig M. Carpenter, Ross S. Dando | 2008-09-09 |
| 7396570 | Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers | Cem Basceri, Irina Vasilyeva, Ammar Derraa, Gurtej S. Sandhu | 2008-07-08 |
| 7393563 | Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers | Cem Basceri, Irina Vasilyeva, Ammar Derraa, Gurtej S. Sandhu | 2008-07-01 |
| 7329292 | Process byproduct trap and system including same | Allen Mardian | 2008-02-12 |
| 7311947 | Laser assisted material deposition | Ross S. Dando, Dan Gealy, Craig M. Carpenter, Allen Mardian | 2007-12-25 |
| 7270715 | Chemical vapor deposition apparatus | Ross S. Dando, Craig M. Carpenter, Allen Mardian | 2007-09-18 |
| 7234412 | Semiconductor substrate deposition processor chamber liner apparatus | Craig M. Carpenter, Ross S. Dando, Allen Mardian, Gurtej S. Sandhu | 2007-06-26 |
| 7229666 | Chemical vapor deposition method | Allen Mardian, Craig M. Carpenter, Randy Mercil, Sujit Sharan | 2007-06-12 |
| 7192487 | Semiconductor substrate processing chamber and accessory attachment interfacial structure | Craig M. Carpenter, Ross S. Dando, Allen Mardian, Kevin Hamer, Raynald Cantin +2 more | 2007-03-20 |
| 7185601 | Chemically sensitive warning apparatus and method | Craig M. Carpenter, Allen Mardian, Ross S. Dando | 2007-03-06 |
| 7105208 | Methods and processes utilizing microwave excitation | Craig M. Carpenter, Ross S. Dando | 2006-09-12 |
| 7044997 | Process byproduct trap, methods of use, and system including same | Allen Mardian | 2006-05-16 |
| 7033642 | Plasma enhanced chemical vapor deposition method of forming a titanium silicide comprising layer | Cem Basceri, Irina Vasilyeva, Ammar Derraa, Gurtej S. Sandhu | 2006-04-25 |
| 6858264 | Chemical vapor deposition methods | Ross S. Dando, Craig M. Carpenter, Allen Mardian | 2005-02-22 |
| 6849133 | CVD apparatuses and methods of forming a layer over a semiconductor substrate | Craig M. Carpenter, Ross S. Dando, Kevin Hamer | 2005-02-01 |
| 6845734 | Deposition apparatuses configured for utilizing phased microwave radiation | Craig M. Carpenter, Ross S. Dando | 2005-01-25 |
| 6814813 | Chemical vapor deposition apparatus | Ross S. Dando, Craig M. Carpenter, Allen Mardian | 2004-11-09 |
| 6800172 | INTERFACIAL STRUCTURE FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND SUBSTRATE TRANSFER CHAMBERS AND FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND ACCESSORY ATTACHMENTS, AND SEMICONDUCTOR SUBSTRATE PROCESSOR | Craig M. Carpenter, Ross S. Dando, Allen Mardian, Kevin Hamer, Raynald Cantin +2 more | 2004-10-05 |
| 6787373 | Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates | Ross S. Dando, Craig M. Carpenter, Allen Mardian, Gurtej S. Sandhu | 2004-09-07 |
| 6767823 | Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers | Cem Basceri, Irina Vasilyeva, Ammar Derraa, Gurtej S. Sandhu | 2004-07-27 |
| 6758911 | Apparatus and process of improving atomic layer deposition chamber performance | David J. Kubista | 2004-07-06 |
| 6734051 | Plasma enhanced chemical vapor deposition methods of forming titanium silicide comprising layers over a plurality of semiconductor substrates | Cem Basceri, Irina Vasilyeva, Ammar Derraa, Gurtej S. Sandhu | 2004-05-11 |
| 6730355 | Chemical vapor deposition method of forming a material over at least two substrates | Ammar Derraa, Cem Basceri, Irina Vasilyeva, Gurtej S. Sandhu | 2004-05-04 |
| 6716284 | Apparatus and process of improving atomic layer deposition chamber performance | David J. Kubista | 2004-04-06 |