Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6677250 | CVD apparatuses and methods of forming a layer over a semiconductor substrate | Craig M. Carpenter, Ross S. Dando, Kevin Hamer | 2004-01-13 |
| 6620253 | Engagement mechanism for semiconductor substrate deposition process kit hardware | Ross S. Dando, Craig M. Carpenter, Allen Mardian, Gurtej S. Sandhu | 2003-09-16 |
| 6613587 | Method of replacing at least a portion of a semiconductor substrate deposition chamber liner | Craig M. Carpenter, Ross S. Dando, Allen Mardian, Gurtej S. Sandhu | 2003-09-02 |
| 6586285 | Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers | Cem Basceri, Irina Vasilyeva, Ammar Derraa, Gurtej S. Sandhu | 2003-07-01 |
| 6468925 | Plasma enhanced chemical vapor deposition process | Sujit Sharan, Craig M. Carpenter, Allen Mardian | 2002-10-22 |
| 6461436 | Apparatus and process of improving atomic layer deposition chamber performance | David J. Kubista | 2002-10-08 |
| 6412437 | Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition process | Sujit Sharan, Craig M. Carpenter, Allen Mardian | 2002-07-02 |