Issued Patents All Time
Showing 251–275 of 292 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5863327 | Apparatus for forming materials | — | 1999-01-26 |
| 5846888 | Method for in-situ incorporation of desirable impurities into high pressure oxides | David L. Chapek | 1998-12-08 |
| 5837580 | Method to form hemi-spherical grain (HSG) silicon | Lyle Breiner | 1998-11-17 |
| 5835225 | Surface properties detection by reflectance metrology | — | 1998-11-10 |
| 5825498 | Ultraviolet light reflectance method for evaluating the surface characteristics of opaque materials | Michael Nuttall, J. Brett Rolfson, Robert Burke | 1998-10-20 |
| 5804506 | Acceleration of etch selectivity for self-aligned contact | Gordon A. Haller, Kirk D. Prall | 1998-09-08 |
| 5783804 | Reflectance method for accurate process calibration in semiconductor substrate heat treatment | Robert Burke, Russell C. Zahorik, Paul A. Paduano | 1998-07-21 |
| 5780364 | Method to cure mobile ion contamination in semiconductor processing | — | 1998-07-14 |
| 5759262 | Method of forming hemispherical grained silicon | Ronald A. Weimer, Avishai Kepten, Michael Sendler | 1998-06-02 |
| 5721171 | Method for forming controllable surface enhanced three dimensional objects | Er-Xuan Ping | 1998-02-24 |
| 5719991 | System for compensating against wafer edge heat loss in rapid thermal processing | Gurtej S. Sandhu | 1998-02-17 |
| 5716862 | High performance PMOSFET using split-polysilicon CMOS process incorporating advanced stacked capacitior cells for fabricating multi-megabit DRAMS | Aftab Ahmad, Kirk D. Prall, Tyler Lowrey, Brett Rolfson | 1998-02-10 |
| 5712186 | Method for growing field oxide to minimize birds' beak length | Michael Nuttall, Pai-Hung Pan | 1998-01-27 |
| 5691228 | Semiconductor processing method of making a hemispherical grain (HSG) polysilicon layer | Er-Xang Ping | 1997-11-25 |
| 5686748 | Dielectric material and process to create same | Gurtej S. Sandhu | 1997-11-11 |
| 5672539 | Method for forming an improved field isolation structure using ozone enhanced oxidation and tapering | J. Brett Rolfson, Fernando Gonzalez, John T. Moore | 1997-09-30 |
| 5663090 | Method to thermally form hemispherical grain (HSG) silicon to enhance capacitance for application in high density DRAMs | Charles H. Dennison | 1997-09-02 |
| 5658381 | Method to form hemispherical grain (HSG) silicon by implant seeding followed by vacuum anneal | Michael Nuttall | 1997-08-19 |
| 5656531 | Method to form hemi-spherical grain (HSG) silicon from amorphous silicon | Lyle Breiner | 1997-08-12 |
| 5654904 | Control and 3-dimensional simulation model of temperature variations in a rapid thermal processing machine | — | 1997-08-05 |
| 5652181 | Thermal process for forming high value resistors | — | 1997-07-29 |
| 5646075 | Method for optimizing thermal budgets in fabricating semiconductors | Fernando Gonzalez | 1997-07-08 |
| 5639685 | Semiconductor processing method of providing a conductively doped layer of hemispherical grain polysilicon | John K. Zahurak, Klaus Schuegraf | 1997-06-17 |
| 5634974 | Method for forming hemispherical grained silicon | Ronald A. Weimer, Avishai Kepten, Michael Sendler | 1997-06-03 |
| 5629223 | Method to prepare hemi-spherical grain (HSG) silicon using a fluorine based gas mixture and high vacuum anneal | — | 1997-05-13 |