Issued Patents All Time
Showing 276–292 of 292 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5624865 | High pressure reoxidation anneal of silicon nitride for reduced thermal budget silicon processing | Klaus Schuegraf, Pierre C. Fazan | 1997-04-29 |
| 5618461 | Reflectance method for accurate process calibration in semiconductor wafer heat treatment | Robert Burke, Russell C. Zahorik, Paul A. Paduano | 1997-04-08 |
| 5561612 | Control and 3-dimensional simulation model of temperature variations in a rapid thermal processing machine | — | 1996-10-01 |
| 5504831 | System for compensating against wafer edge heat loss in rapid thermal processing | Gurtej S. Sandhu | 1996-04-02 |
| 5474955 | Method for optimizing thermal budgets in fabricating semconductors | — | 1995-12-12 |
| 5445999 | Advanced technique to improve the bonding arrangement on silicon surfaces to promote uniform nitridation | Viju K. Mathews | 1995-08-29 |
| 5425392 | Method DRAM polycide rowline formation | Fernando Gonzalez, Annette L. Martin | 1995-06-20 |
| 5407534 | Method to prepare hemi-spherical grain (HSG) silicon using a fluorine based gas mixture and high vacuum anneal | — | 1995-04-18 |
| 5382551 | Method for reducing the effects of semiconductor substrate deformities | Annette L. Martin | 1995-01-17 |
| 5382533 | Method of manufacturing small geometry MOS field-effect transistors having improved barrier layer to hot electron injection | Aftab Ahmad | 1995-01-17 |
| 5376593 | Method for fabricating stacked layer Si.sub.3 N.sub.4 for low leakage high capacitance films using rapid thermal nitridation | Gurtej S. Sandhu | 1994-12-27 |
| 5372974 | Approach to avoid buckling in BPSG by using an intermediate barrier layer | Trung T. Doan, Yauh-Ching Liu | 1994-12-13 |
| 5364187 | System for repeatable temperature measurement using surface reflectivity | Gurtej S. Sandhu, Annette L. Martin | 1994-11-15 |
| 5360769 | Method for fabricating hybrid oxides for thinner gate devices | Annette L. Martin, Ralph Kauffman | 1994-11-01 |
| 5350236 | Method for repeatable temperature measurement using surface reflectivity | Gurtej S. Sandhu, Annette L. Martin | 1994-09-27 |
| 5340765 | Method for forming enhanced capacitance stacked capacitor structures using hemi-spherical grain polysilicon | Charles H. Dennison | 1994-08-23 |
| 5264396 | Method for enhancing nitridation and oxidation growth by introducing pulsed NF.sub.3 | Richard C. Hawthorne, Annette L. Martin, Gurtej S. Sandhu | 1993-11-23 |