Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8015540 | Method and system for reducing inter-layer capacitance in integrated circuits | Neal Callan, Paul G. Filseth | 2011-09-06 |
| 7966582 | Method and apparatus for modeling long-range EUVL flare | Lawrence S. Melvin, III, Brian S. Ward | 2011-06-21 |
| 7396760 | Method and system for reducing inter-layer capacitance in integrated circuits | Neal Callan, Paul G. Filseth | 2008-07-08 |
| 7149340 | Mask defect analysis for both horizontal and vertical processing effects | Paul G. Filseth, Neal Callan, Mario Garza | 2006-12-12 |
| 7148146 | Method of fabricating an integral capacitor and gate transistor having nitride and oxide polish stop layers using chemical mechanical polishing elimination | Gregory A. Johnson | 2006-12-12 |
| 7067223 | Adjustable transmission phase shift mask | Dodd Defibaugh | 2006-06-27 |
| 7033710 | Method and apparatus for enhancing image contrast using intensity filtration | — | 2006-04-25 |
| 6970622 | Arrangement and method for controlling the transmission of a light signal based on intensity of a received light signal | — | 2005-11-29 |
| 6864020 | Chromeless phase shift mask using non-linear optical materials | Neal Callan | 2005-03-08 |
| 6852243 | Confinement device for use in dry etching of substrate surface and method of dry etching a wafer surface | Charles W. Jurgensen, Gregory A. Johnson | 2005-02-08 |
| 6841308 | Adjustable transmission phase shift mask | Dodd Defibaugh | 2005-01-11 |
| 6775818 | Device parameter and gate performance simulation based on wafer image prediction | Neal Callan, Nadya Strelkova | 2004-08-10 |
| 6699766 | Method of fabricating an integral capacitor and gate transistor having nitride and oxide polish stop layers using chemical mechanical polishing elimination | Gregory A. Johnson | 2004-03-02 |
| 6549322 | Method and apparatus for enhancing image contrast using intensity filtration | — | 2003-04-15 |
| 6527867 | Method for enhancing anti-reflective coatings used in photolithography of electronic devices | Gayle W. Miller, Gail D. Shelton | 2003-03-04 |
| 6441419 | Encapsulated-metal vertical-interdigitated capacitor and damascene method of manufacturing same | Gregory A. Johnson, Gayle W. Miller | 2002-08-27 |
| 6417535 | Vertical interdigitated metal-insulator-metal capacitor for an integrated circuit | Gregory A. Johnson | 2002-07-09 |
| 6303899 | Method and apparatus for scribing a code in an inactive outer clear out area of a semiconductor wafer | Gregory A. Johnson | 2001-10-16 |
| 6288773 | Method and apparatus for removing residual material from an alignment mark of a semiconductor wafer | Gregory A. Johnson | 2001-09-11 |
| 6285035 | Apparatus for detecting an endpoint polishing layer of a semiconductor wafer having a wafer carrier with independent concentric sub-carriers and associated method | — | 2001-09-04 |
| 6277707 | Method of manufacturing semiconductor device having a recessed gate structure | Brian R. Lee, Gayle W. Miller | 2001-08-21 |
| 6271911 | Apparatus for enhancing image contrast using intensity filtration | — | 2001-08-07 |
| 6261406 | Confinement device for use in dry etching of substrate surface and method of dry etching a wafer surface | Charles W. Jurgensen, Gregory A. Johnson | 2001-07-17 |
| 6251740 | Method of forming and electrically connecting a vertical interdigitated metal-insulator-metal capacitor extending between interconnect layers in an integrated circuit | Gregory A. Johnson | 2001-06-26 |
| 6225215 | Method for enhancing anti-reflective coatings used in photolithography of electronic devices | Gayle W. Miller, Gail D. Shelton | 2001-05-01 |