Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6174407 | Apparatus and method for detecting an endpoint of an etching process by transmitting infrared light signals through a semiconductor wafer | Gregory A. Johnson | 2001-01-16 |
| 6120607 | Apparatus and method for blocking the deposition of oxide on a wafer | — | 2000-09-19 |
| 6074517 | Method and apparatus for detecting an endpoint polishing layer by transmitting infrared light signals through a semiconductor wafer | — | 2000-06-13 |