Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996647 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Mehmet Derya Tetiker, Andrew D. Bailey, III, Alex Paterson, Richard A. Gottscho | 2018-06-12 |
| 9978565 | Systems for cooling RF heated chamber components | Jon McChesney, Ricky Marsh, Alex Paterson, John Holland | 2018-05-22 |
| 9966270 | Gas reaction trajectory control through tunable plasma dissociation for wafer by-product distribution and etch feature profile uniformity | Monica Titus, Alex Paterson | 2018-05-08 |
| 9885493 | Air cooled faraday shield and methods for using the same | John Drewery, Jon McChesney, Alex Paterson | 2018-02-06 |
| 9792393 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Mehmet Derya Tetiker, Andrew D. Bailey, III, Alex Paterson, Richard A. Gottscho | 2017-10-17 |
| 9640408 | Fast-gas switching for etching | Alexander Paterson | 2017-05-02 |
| 9275869 | Fast-gas switching for etching | Alexander Paterson | 2016-03-01 |
| 9053908 | Method and apparatus for controlling substrate DC-bias and ion energy and angular distribution during substrate etching | Alexander Paterson | 2015-06-09 |
| 7303999 | Multi-step method for etching strain gate recesses | Linda Braly | 2007-12-04 |