Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080592 | Film stack simplification for high aspect ratio patterning and vertical scaling | Hui-Jung Wu, Bart J. van Schravendijk, Mark Kawaguchi, Gereng Gunawan, Jay E. Uglow +11 more | 2024-09-03 |
| 12040193 | Efficient cleaning and etching of high aspect ratio structures | Ji Zhu, Mark Kawaguchi | 2024-07-16 |
| 11488831 | Efficient cleaning and etching of high aspect ratio structures | Ji Zhu, Mark Kawaguchi | 2022-11-01 |
| 11062897 | Metal doped carbon based hard mask removal in semiconductor fabrication | Yongsik Yu, David Cheung, Kirk Ostrowski, Nikkon Ghosh, Karthik S. Colinjivadi +2 more | 2021-07-13 |
| 10446416 | Method and apparatus for processing wafer-shaped articles | David Mui, Michael Ravkin | 2019-10-15 |