Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6692903 | Substrate cleaning apparatus and method | Haojiang Chen, James S. Papanu, Harald Herchen, Jeng H. Hwang, Guangxiang Jin +1 more | 2004-02-17 |
| 6680164 | Solvent free photoresist strip and residue removal processing for post etching of low-k films | Huong Nguyen, Mehul Naik, Li-Qun Xia, Ellie Yieh | 2004-01-20 |